The use of organo-silanes as coupling agents offers the potential to create novel structures using materials that would otherwise suffer from poor adhesion. gamma-methacryloxypropyltrimethoxysilane (gamma-MAPTS) layers were deposited on hydroxylated SiO2 surfaces using both vapor and solution deposition techniques. The films were characterized using variable angle spectroscopic ellipsometry, infrared spectroscopy, contact-angle measurements and X-ray photoelectron spectroscopy. Film thickness was relatively constant at similar to 6 angstrom for solution deposition times from 2 min to 2 h at 60 degrees C. Water contact angle increased from 0 degrees to 45 degrees after silane deposition from solution. Room temperature vapor-deposited gamma-MAPTS films showed similar thicknesses to those of solution deposited films but a markedly lower contact angle of 10 degrees. Parylene N was chemical vapor deposited on the gamma-MAPTS films and its adhesion was tested using the Scotch(R) Tape test. The gamma-MAPTS improved adhesion of parylene, N to the hydroxylated surface, with the adhesion for the vapor deposited silane films exhibiting a temperature and time dependence.