This study investigates the fabrication of a stable superhydrophobic surface with low contact angle (CA) hysteresis using ZnO thin films prepared by cathodic electrodeposition and subsequent gaseous oxidation. The deposition time is a crucial factor in nanostructuring and producing surface roughness of the films. Cathodic electrodeposition for 60 s created a number of nanopillars, which exhibited the highest CA value, i.e., 167.9 degrees. The rough ZnO surface displayed not only enhanced water repellency with low CA hysteresis but also excellent superhydrophobic stability. The application of the Cassie-Baxter model demonstrated that the ZnO nanostructure contributed to increasing the area of a water droplet in contact with air, leading to superhydrophobicity. Such a unique textured surface showed a great potential for the engineering of strong superhydrophobic coatings. (C) Koninklijke Brill NV, Leiden, 2009