Titanium was anodized potentiodynamically in acidic solution of pH 3 (Na2SO4 + H2SO4) in the potential region before and at oxygen evolution. The oxide film growth efficiency in the range of potential above oxygen evolution was investigated using galvanostatic charging curves. A value of 62% for the efficiency was estimated. The conductivity characteristics of the oxide film formed in the two regions were investigated on the basis of the variation of the dielectric constant. Values of 18.2 and 39.7 for the dielectric constant were obtained for oxides formed in the region before and at the oxygen evolution potential, respectively.