Lattice-mismatched ZnTe epilayers on GaAs (100) substrates with and without ZnSe buffer layers were grown by using molecular beam epitaxy. AFM, XRD, and TEM measurements were performed to investigate the surface and structural properties of the ZnTe thin films. Photoluminescence, Raman scattering, and TEM measurements showed that the crystallinity of a ZnTe epilayer grown on a GaAs substrate was remarkably improved by using a ZnSe buffer layer. Photoreflectance measurements showed that the strain of the ZnTe layer with the ZnSe buffer layer was smaller than that without the ZnSe buffer layer. These results indicate that ZnTe epitaxial films grown on GaAs substrates with ZnSe buffer layers hold promise for potential applications in optoelectronic devices operating in the blue-green spectral region. (C) 2002 Elsevier Science Ltd. All rights reserved.