AlxZn1-xO (x = 0-0.5) thin films were prepared on quartz glass substrates by sot-gel technique. X-ray diffraction (XRD), scanning electron microscope (SEM), and X-ray photoelectron spectroscopy (XPS) were employed for microstructure characterization of these thin films. In films with up to 20 at.% Al incorporation, compound nano-crystal phase was observed while wurtzite structure disappeared. Zn3d electron binding energy and Zn LMM's chemical shift were both increased by more than 0.4 eV. Transmittance spectra revealed that these films possessed high transmittance in the visible region, and the end of UV absorption edge shifted to less than 300 nm when Al content exceeds 20 at.% due to quantum confinement effect. (C) 2010 Elsevier Ltd. All rights reserved.