In this paper, we aim to discover the mechanics-related novel phenomena on high-quality ZnO microwires through nanoindentation method. The mechanical property parameters of ZnO microwires were determined and a distinctive creep damage phenomenon was revealed. By using the cycles load mode in the nanoindentation experiments, the indentation size effect was demonstrated to exist in the ZnO microwires: the elastic modulus ranged from 65.9 GPa to 12.3 GPa and the hardness changed from 11.1 GPa to 1.8 GPa with the increase of indentation depth. Furthermore, the indentation-induced mechanical and electrical damage caused a permanent plastic deformation and an increase of 41% in the longitudinal conductance of the ZnO microwires. (C) 2011 Elsevier Ltd. All rights reserved.