화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.21, No.2, 201-223, 2001
An investigation of the positive column of a Cd-Ne glow discharge: II. Afterglow
The afterglow of a Cd-Ne glow discharge is investigated theoretically and experimentally, The time-dependent electron Boltzmann equation and the balance equations for the Cd excited stales and charged particles have been self-consistently solved. The temporal relaxation of the electron energy distribution function, electron, and cadmium excited states densities is reported and the influence of neon and cadmium vapor pressure on the plasma characteristics in the afterglow is studied. The modeling compares favorably with experimental results.