Plasma Chemistry and Plasma Processing, Vol.23, No.3, 559-568, 2003
An ozone generator of miniaturization and modularization with the narrow discharge gap
The method of ionization discharge has a key action on the process of the ionization and decomposition of O-2 molecule as well as the re-decomposition of O-3 molecule. In this paper, an ozone generation of miniaturization which was fabricated by stacking discharge modules with rectangle is introduced, only volume of 23.0 x 53.0 x 42.0 cm(3) for ozone production capacity of 1 kg/hr. In addition, the ozone concentration and its production efficiency are significantly improved in comparison with a conventional ozone generator, which have the highest ozone concentration of 308 g/Nm(3) and the production efficiency of 118 g/k Wh at ozone concentration of 200 g/Nm(3).
Keywords:dielectric barrier discharge;miniaturization;ozone concentration;ozone production efficiency