A comprehensive model was developed to investigate the suspension spraying for a radio frequency (RF) inductively coupled plasma torch. Firstly, the electromagnetic field is solved with the Maxwell equations and validated by the analytical solutions. Secondly, the plasma field with different power inputs is simulated by solving the governing equations of the fluid flow coupled with the RF heating. Then, the suspension droplets embedded with nano particles are modeled in a Lagrangian manner, considering feeding, collision, heating and evaporation of the suspension droplets, as well as tracking, acceleration, melting and evaporation of the nano or agglomerate particles. The non-continuum effects and the influence of the evaporation on the heat transfer are considered. This particle model predicts the trajectory, velocity, temperature and size of the in-flight nano- or agglomerate particles. The effects of operating conditions and intial inputs on the particle characteristics are investigated. The statistical distributions of multiple particles' size, velocity, temperature are also discussed for the cases with and without consideration of suspension droplets collision.