Surface probes, based on airflow particle detachment coupled with optical particle counter, are actually available to measure the particle cleanliness of surfaces in cleanroom. No reliable data exits dealing with the performance assessment of these probes in unstuck and counting particles deposited on surfaces. This work presents a method for determining the efficiency of instruments dedicated to particle surface cleanliness measurements. The method is based on the realisation of standard particle deposits by sedimentation and analysis of whole of the contaminated surface by microscopy combined with a micrometric displacement bench. The method is used to assess a trial surface probe with 30?mu m and 80?mu m glass beads deposited on transparent (glass) or opaque (aluminium) surfaces at concentrations ranging from 1 particle center dot cm2 to 50 particles center dot cm2. The results obtained show that the overall efficiency of the instrument tested is less than 5?%. The detailed analysis of results shows that this low value is mainly due to poor efficiency of sampling and detection of particles in the optical counter. When analysed in terms of particle detachment efficiency, the results agree qualitatively with a force balance analysis taking into account the friction by airflow and the distribution of adhesion forces of glass particles to glass substrates or rough aluminium substrates. Such result shows that airflow based surface probes for particle cleanliness measurements should be systematically qualified for representative conditions of operations whereas analytical microscopy measurements could be considered as reference.