Przemysl Chemiczny, Vol.91, No.1, 75-79, 2012
Use of scanning electron microscopy and Raman spectroscopy for studying the diamond layers of various quality
Thin diamond layers were deposited over a Si substrate by the hot filament chemical vapor deposition technique by using MeH and H-2 gas mixture. The layers were analyzed by scanning electron microscopy and Raman spectroscopy. The diamond film morphol. and quality strongly depended on the MeH/H-2 ratio in the working gas. The films showed (111), (100) and ball-like morphol.