Spatial distribution of minority-carrier lifetime (tau) in multicrystalline silicon solar cells was investigated. By mapping of tau, a wide distribution in a higher-efficiency cell and a narrow distribution in a lower-efficiency cell was found, respectively. Based on the relation between tau and the density of grain boundaries, spatial distribution of impurities was characterized by secondary ion mass spectrometry. To clarify the spatial profile near grain boundaries, a method of changing detection area was carried out. Iron (Fe) segregation within 100 mum around a grain boundary was observed. In the lower-efficiency cell, a measurable amount of Fe was contained in a crystalline area as well. (C) 2002 Elsevier Science B.V. All rights reserved.