Cerium vanadate films on glass substrate were obtained by sol-gel process. The morphology of these nanostructured and porous films was studied by grazing-incidence small-angle X-ray scattering (GISAXS) at synchrotron ELETTRA, Trieste, Italy. The aim of the GISAXS study was to investigate the changes in grain sizes due to the temperature evolution with three different time intervals (5, 15 and 30 min) of annealing at 673 K. We found that the effects of the different times of annealing are different for surface and bulk properties of this V/Ce oxide. (c) 2007 Elsevier B.V. All rights reserved.