Fluorine-doped indium oxide thin films, F-In2O3, prepared by the spray pyrolysis technique on glass Substrates have been studied using cathodoluminescence spectroscopy, X-ray diffraction and spectrophotometry. These films, deposited at the optimal substrate temperature (T-s = 450 degrees C, crystallize in a cubic structure with a preferential orientation along the (4 0 0) direction. For this temperature, the electrical resistivity is in the order of 6 x 10(-3) Omega cm and the average optical transmission in the visible region is larger than 95%. At room temperature, the cathodoluminescence spectra of F-In2O3 present two emission peaks: blue indirect band gap peak at 410 nm and a red emission at 650 nm. (C) 2008 Elsevier B.V. All rights reserved.