The film deposition process and integrated technology of the CdTe mini-module with high efficiency are key steps to manufacture large-area modules. In this paper, CdS, CdTe and ZnTe:Cu films with a substrate area of 7 x 10 cm(2) were deposited by chemical bath deposition, close-spaced sublimation and vacuum co-evaporation, respectively. The uniform films were prepared after their thicknesses, structures and electronic characteristics were studied as the function of deposition parameters. The films of SnO(2):F, CdTe, etc, were scribed by Kr-lamp-pumped Q-switch YAG:Nd laser. The pumped lamp current, Q-switch frequency and scribing rate were optimized. The scribing efficiency of the base frequency light was compared with that of doubled frequency light. The integrated structure design was optimized after simulating. Then the CdTe mini-module of 7.03% efficiency was gained with a total area of 54 cm(2) and nine integrated elementary cells. (C) 2008 Elsevier B.V. All rights reserved.