CuIn3Te5 thin films were deposited onto soda-lime glass (SLG) substrates by using a molecular beam epitaxy (MBE) system. Microstructural properties were examined by means of scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman scattering. The substrate temperature (T-sub) dependence of film properties was investigated in the range of 100-400 degrees C. Large-grain CuIn3Te5 thin films with a defect chalcopyrite structure were dominantly grown at 200-400 degrees C. Preferred (1 1 2) orientation was observed even at the low substrate temperature of 200 degrees C. The optical bandgaps of these films were determined to be 1.01-1.05 eV from transmission and reflection measurements. The best solar cell fabricated using CuIn3Te5 thin films grown at 200 degrees C yielded an efficiency of 4.64% with V-oc = 318 mV, J(sc) = 29.0 mA/cm(2) and FF=0.504. (C) 2010 Elsevier B.V. All rights reserved.