CdTe solar cells and modules have been manufactured on polyimide (PI) substrates. Aluminum doped zinc oxide (ZnO:Al) was used as a transparent conductive oxide (TCO) front contact, while a thin high resistive transparent layer of intrinsic zinc oxide (i-ZnO) was used between the front contact and the CdS layer. The CdS and CdTe layers were evaporated onto the ZnO:Al/i-ZnO coated PI films in a high vacuum evaporation system followed by a CdCl(2) activation treatment and a Cu-Au electrical back contact deposition. In some cases prior to the cell deposition, the PI film was coated with MgF(2) on the light facing side and the effects on the optical and electrical properties of TCO and solar cells were investigated. The limitations on current density of solar cells due to optical losses in the PI substrate were estimated and compared to the experimentally achieved values. Flexible CdTe solar cells of highest efficiencies of 12.4% and 12.7% were achieved with and without anti-reflection MgF(2) coating, respectively. Laser scribing was used for patterning of layers and monolithically interconnected flexible solar modules exhibiting 8.0% total area efficiency on 31.9 cm(2) were developed by interconnection of 11 solar cells in series. (C) 2010 Elsevier B.V. All rights reserved.