We fabricated Cu2ZnSnS4 (CZTS) thin films using two different methods, spray pyrolysis and sulfurization of Cu-Zn-Sn metallic films. Spray pyrolysis was carried out under air ambient with modified ultrasonic spray system. Sulfurizations of metallic Cu-Zn-Sn films were done for stacked metallic films, Cu/Sn/Zn/glass, Cu/Sn/Cu/Zn/glass and Sn/Cu/Zn/glass, which were prepared by sputtering method in high vacuum chamber. The sprayed films were not observed to be grown well with good crystallinity, compared with CZTS films made by sulfurization of stacked metallic films. However, it was found that application of additional sulfurization to sprayed CZTS films induced great improvement of crystallinity to the level of the sulfurized metallic films. This implicates that spray pyrolysis with additional sulfurization is a good method for fabrication of CZTS films, especially as a low-cost fabrication technique. All CZTS films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and Raman spectroscopy measurements. (C) 2010 Elsevier B.V. All rights reserved.