The authors report the growth of single crystalline ZnO nanorods by direct current magnetron sputtering in the oblique angle deposition configuration near room temperature. These isolated nanorods have a diameter of similar to 40 nm, an inter-rod spacing of similar to 20 nm, and a height of similar to 100 nm. The nanorods show a (002) orientation along the rod-axis which is normal to the substrate. The low temperature fabrication of single crystal ZnO nanorods may find potential applications in optoelectronics and energy conversion devices. (C) 2007 Elsevier B.V. All rights reserved.