The electromagnetic behavior of nanoscale layered and particulate structures of Fe(x)Al(1-x)N(y)O(1-y) materials have potential applications in medical device technologies. Iron and aluminum have been co-sputtered in an Ar-N(2) ambient to form a combinatorial array of Fe(x)Al(1-x)N(y)O(1-y) thin films. Using this approach, we are able to achieve an Fe/(Fe + Al) cation range from similar to 12-60% over a 10 cm long substrate. The deposited films were annealed in vacuum at various temperatures and the films have been characterized by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, scanning electron microscopy, scanning transmission electron microscopy, and X-ray diffraction. Furthermore, the direct current magnetic properties of the films have been characterized. In this paper, we describe in detail the reactive combinatorial Fe(x)Al(1-x)N(y)O(1-y) sputtering approach. The chemical, structural, and morphological properties as a function of Fe/(Fe+Al) content are demonstrated and correlated to the measured dc magnetic properties. (c) 2007 Elsevier B.V. All rights reserved.