Flexible thin solid films made of fluorocarbon polymers such as PFA (perfluoroalkoxy fluoroplastics), PTFE (polytetrafluoroethylene), and PCTFE (polychlorotrifluoroethylene) have excellent properties in terms of flexibility, gas and moisture barriers, etc. We develop a surface modification technique for improving the adhesion of the films using an atmospheric-pressure NTP (nonthermal plasma) method followed by graft-polymerization of the hydrophilic monomer. The results of the T-type peeling test show that the peeling strength of the film is thirty times larger than that of the untreated film. it is confirmed from XPS (X-ray photoelectron spectroscopy), FTIR (Fourier transform infrared spectrophotometer) and the SEM (Scanning electron microscope) analyses that a few F atoms exist on the surface and the hydrophilic layer with a thickness is of the order of 1 mu m is formed due to the grafting process. (C) 2007 Elsevier B.V. All rights reserved.