Thin films of polysilicon are an attractive material to reduce the cost of photovoltaic energy. Among the different polysilicon techniques, fine-grained polysilicon deposited directly onto a foreign substrate is an interesting option, since no extra seed layer or crystallization step is needed. However, the fabrication of efficient fine-grained polysilicon solar cells is a real challenge due to the large number of defects and the small average grain size of only 0.2 mu m. This paper reports on our recent progress with fine-grained polysilicon solar cells. Using a diffuse refracting top surface and a more efficient two-step hydrogenation, we obtained an efficiency of 5.0%. (C) 2007 Elsevier B.V. All rights reserved.