Proceedings of the EMRS 2007 Fall Meeting Symposium H: Current Trends in Optical and X-Ray Metrology of Advanced Materials and Devices II, Warsaw, Poland

Servet B; Tomozeiu N; Modreanu M; Durand O; Jellison GE; Massies J

Thin Solid Films, Vol.516, No.22, 7953-7954, 2008

DOI10.1016/j.tsf.2008.04.033 Export Citation

Proceedings of the EMRS 2007 Fall Meeting Symposium H: Current Trends in Optical and X-Ray Metrology of Advanced Materials and Devices II, Warsaw, Poland

Servet B, Tomozeiu N, Modreanu M, Durand O, Jellison GE, Massies J