Steel foil is an attractive candidate for use as a flexible substrate material for Cu(In(x),Ga(1-x))Se(2) solar cells (CIGS). It is stable at the high temperatures involved during CIGS processing and is also commercially available. Stainless chromium (Cr) steel is more expensive than Cr-free steel sheets, but the latter are not stable against corrosion. We processed CIGS solar cells on both types of substrates. The main problem arising here is the diffusion of detrimental elements from the substrate into the CIGS absorber layer. The diffusion of iron (Fe) and other substrate elements into the CIGS layer was investigated by Secondary Ion Mass Spectrometry (SIMS). The influence of the impurities on the solar cell parameters was determined by current voltage (JV) and external quantum efficiency (EQE) measurements. A direct correlation between the Fe content in the CIGS layer and the solar cell efficiency was found. The diffusion of Fe could be strongly reduced by a diffusion barrier layer. Thus we could process CIGS solar cells with a conversion efficiency of 12.8% even on Cr-free steel substrate. (C) 2008 Published by Elsevier B.V.