The effect of pressure on the structure and composition of silicon nanoparticles synthesized by hot wire thermal catalytic pyrolysis (HW-TCP) of pure silane has been investigated. Light brown powders were produced at silane pressures of 10 and 50 mbar, at a flow rate of 50 sccm, using a tungsten filament at temperatures of 1900 degrees C and 1800 degrees C respectively. As determined by transmission electron microscopy and X-ray diffraction, the particles produced at lower pressure have sizes around 10 nm, whereas those produced at higher pressure are typically 50 nm. High resolution transmission electron microscopy (HR-TEM) shows a surface layer of between 2 and 5 nm thickness, which was confirmed by X-ray photoemission spectroscopy to be an oxide shell. Both X-ray diffraction and HR-TEM confirm a high degree of crystallinity in both sets of particles, with Raman spectroscopy indicating an increase in crystalline fraction with synthesis pressure. (C) 2009 Elsevier B.V. All rights reserved.