화학공학소재연구정보센터
Thin Solid Films, Vol.517, No.12, 3622-3624, 2009
A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method
Super-hydrophobic poly-tetrafluoroethylene (PTFE) films, with a water contact angle of over 160 degrees, are formed by catalytic chemical vapor deposition (Cat-CVD) under high catalyzer temperature or pressure. Hydrophobicity of the PTFE films is maintained even after annealing up to 300 degrees C. We demonstrate a novel method for forming metal lines using super-hydrophobic PTFE films. Water-based functional liquid containing silver nanoparticles dropped on the patterned PTFE film localizes only on hydrophilic regions, resulting in formation of metal lines after annealing up to 150 degrees C. (c) 2009 Elsevier B.V. All rights reserved.