Conductive polymer coating precursors were prepared using poly (3, 4-ehtylenedioxythiophene) (PEDOT) and three kinds of silane precursors (Qtype, T type, and bridged T type) through an in-situ organic/inorganic hybrid sol-gel process. The spin-coated precursor films on Poly(ethyleneterephthalate) substrate exhibited fairly good surface resistance (-10(4) Omega/square), transparency (similar to 80%) and pencil hardness (2-4 H). The solvent resistance of the film using 2, 5-bis (triethoxysilyl)-3, 4-ethylenedioxythiophene (BTES-EDOT) was excellent as compared with the films that used silane precursors due to a high degree of BTES-EDOT crosslinking in the hybrid film. Moreover, EDOT moiety in the BTES-EDOT molecule may contribute to homogeneous dispersion of the PEDOT in the organic-inorganic hybrid film. (C) 2008 Elsevier B.V. All rights reserved.