A Si/TiC nanocomposite film was synthesized by a surface sol-gel method in combination with a following heat-treatment process. The electrochemical properties of the film anode for lithium ion batteries were investigated by galvanostatic charge-discharge tests, cyclic voltammetry (CV) and electrochemical impedance spectrum (EIS). Because of the homogeneous distribution of Si active particles in TiC matrix, the Si/TiC composite showed reversible lithium storage capacities of about 1000 and 1300 mAh g(-1) at 160 and 80 mA g(-1) even after 80 cycles, respectively. Using two-parallel diffusion path model, the reactive mechanisms of Li with Si/TiC composite film were interpreted. The chemical diffusion coefficients of the Si/TiC nanocomposite film at different electrode potentials were also discussed. (C) 2009 Elsevier B.V. All rights reserved.