Thin Solid Films, Vol.517, No.17, 4777-4781, 2009
Corrosion behavior of Al, Sc-co-doped ZnO thin films in 3.5% NaCl solution
;The corrosion behavior of Al, Sc-co-doped zinc oxide films (with Sc-dopant varying in 0, 0.01, 0.13, 0.24 and 1.07 wt.% Sc) in 3.5% NaCl solution has been investigated. It was compared to that of the commercial indium tin oxide (ITO) thin film. The films were prepared by sputtering on the ZnO (4 N) target with RF and on the targets of Al (4 N), Al-0.4 wt.% Sc, Al-0.8 wt.% Sc, Al-1.7 wt.% Sc alloy and pure Sc with DC. The electrochemical studies revealed that the corrosion resistance of the films increases in the order AZO