This paper reports a novel structural design of integrated shadow mask and its fabrication technique by thin film processes. The proposed Gamma-shaped mask structure provides passive matrix OLED devices with a higher aperture ratio than the conventional T-shaped profiled masks. The Gamma-shaped mask structure can be realized with a low cost patternable sol-gel and photolithography processes. Full angle deposition can be realized with the new mask structure, which is important for mass production of devices with automatic systems. (C) 2009 Elsevier B.V. All rights reserved.