This paper describes fabrication of silver (Ag) micropatterns on a double-decker-shaped polysilsesquioxane (DDPSQ) hybrid film by laser-induced pyrolysis (LIP) of a film prepared from liquid-dispersed Ag nanoparticles. The line width of Ag micropatterns fabricated by LIP can be controlled flexibly by changing the numerical aperture (NA) value of an objective lens and the focusing point. By changing NA value of an objective lens, line widths of Ag micropatterns can be varied flexibly from 75 PM to 5 Pm. The Ag micropatterns show an excellent adherence to DDPSQ surface as evaluated by adhesive tape test. The resistivity of the Ag micropattern is determined to be 4.3 x 10(-6) Omega cm, which is comparable to that of bulk Ag (1.6 x 10(-6) Omega cm). (C) 2009 Elsevier B.V. All rights reserved.