Previous Article Next Article Table of Contents Thin Solid Films, Vol.517, No.20, 5950-5950, 2009 DOI10.1016/j.tsf.2009.01.027 Export Citation Al(2)O(3) thin film growth on Si (100) using binary reaction sequence chemistry (vol 292, pg 135, 1997) Ott AW, Klaus JW, Johnson JM, George SM Please enable JavaScript to view the comments powered by Disqus.
