Studies on spray deposited transparent conducting Li doped SnO(2) thin films are scarce. Li (0 to 5 wt.%) doped SnO(2) thin films spray deposited onto glass substrates at 773 K in air from chloride precursors were studied for their structural, optical and temperature dependent electrical behaviors. X-ray diffraction patterns indicated single phase with polycrystalline nature. Systematic variation in surface morphology on Li doping was examined by scanning electron microscopy and atomic force microscopy. Film thickness, optical band gap (direct and indirect), sheet resistance and figure of merit were computed from spectral transmittance and temperature dependent resistivity data. Lithium doping was found to decrease the value of sheet resistance by an order in magnitude. Activation energy was computed from temperature dependent electrical resistivity data measured in the range 300 to 448 K. The 4 wt.% Li doped SnO(2) film was found to have a high value of figure of merit among other films. The results are discussed. (C) 2009 Elsevier B.V. All rights reserved.