In this paper, we present a low-cost rapid replication approach to fabricate ZnO and Al-doped ZnO Transparent Conductive Oxide electrode structures using both hard UV curable polyurethane acrylate and soft thermal curable polydimethylsiloxane moulds. The thin films of the ZnO and Al-ZnO sol-gel precursor solution prepared from zinc acetate monoethanolamine and isopropanol were cast into a polydimethylsiloxane or polyurethane acrylate mould containing the electrode design. For soft mould embossing, the sol-gel coated substrate and polydimethylsiloxane mould were dried under vacuum at 70 degrees C for 3h. While for hard mould embossing, the system was heated at 150 degrees C for 30 min with 100 N applying force and then demoulded at 80 degrees C. The formed electrode patterns can be further densified or annealed giving a stable film that retains the embossed shape. The difference of surface profile obtained by soft and hard moulding is detailed and the hard mould is shown to be more suitable for low aspect ratio conductors. And the reliability study on embossed ZnO and Al-ZnO conductive tracks prepared with hard moulds shows that the embossed structure still retains good quality. (C)2009 Elsevier B.V. All rights reserved.