ZnO nanowhiskers array films were successfully fabricated using an aqueous solution deposition at 88 degrees C based on the forced-hydrolysis-initiated-nucleation technique of a template layer. Several zinc salts template layers (anhydrous zinc acetate, layered hydroxide zinc acetate, fibrous monohydrate zinc hydroxonitrate, and two types of layered hydroxide zinc nitrate) were investigated. In-situ forced hydrolysis of low-solubility zinc salts to ZnO nanocrystals at an initial stage promoted homoepitaxial growth of ZnO nanowhiskers array by heterogeneous nucleation on the substrate surface, which were clarified by XRD and FE-SEM. ZnO nanowhiskers; array film was successfully fabricated on the low heat-resistant plastic substrate by this technique. (C) 2009 Elsevier B.V. All rights reserved.