Thin Solid Films, Vol.518, No.4, 1114-1118, 2009
Cadmium oxide, indium oxide and cadmium indate thin films obtained by the sol-gel technique
Thin films of the mixed CdO-In(2)O(3) system were deposited on glass substrates by the sol-gel technique. The precursor solution was obtained starting from the mixture of two precursor solutions of CdO and In(2)O(3) prepared separately at room temperature. The In atomic concentration percentages (X) in the precursor solution with respect to Cd (1-X), were: 0, 16, 33, 50, 67, 84 and 100. The films were sintered at two different sintering temperatures (Ts) 450 and 550 degrees C, and after that, annealed in a 96:4 N(2)/H(2) gas mixture at 350 degrees C. X-ray diffraction patterns showed three types of films, excluding those constituted only of CdO and In(2)O(3) crystals: i) For X <= 50 at.%, the films were constituted of CdO+CdIn(2)O(4) crystals, ii) For X=67 at.%, the films were only formed of CdIn(2)O(4) crystals and iii) For X=84 at.% the films were constituted of In(2)O(3) + CdIn(2)O(4) crystals. In all films in the 0