Thin Solid Films, Vol.518, No.9, 2409-2412, 2010
Equilibrium segregation coefficient and solid solubility of B in Czochralski Ge crystal growth
This paper reports reevaluated results of the segregation coefficient of boron (B) and a solid solubility of B at melting point of Cc The crystal growth was carried out from a B-saturated Ge melt, and a solid solubility of B in Ge crystal was estimated to be 3 +/- 0.5 x 10(18) cm(-3) The effective segregation coefficients of 4 and 2 5 were obtained at Pulling rates of 10 and 30 mm/h. respectively An equilibrium segregation coefficient was estimated to be 6 2 and it was considerably smaller than those reported previously Therefore, boron atoms in Ge melt easily Interact with residual O atoms existing in the Ge melt, resulting in various values reported of the segregation coefficient A phase diagram of Cc and B at Ge-rich region estimated from obtained experimental results is proposed (C) 2009 Elsevier B V. All rights reserved.