Scandium oxide (Sc2O3) films were deposited by electron beam evaporation with substrate temperatures varying from 50 to 350 degrees C. X-ray diffraction, scanning electron microscopy, spectrometer, and optical profilograph were employed to investigate the structural and optical properties of the films. The refractive index and extinction coefficient were calculated from the transmittance and reflectance spectra, and then the energy band gaps were deduced and discussed. Laser induced damage threshold of the films were also characterized. Optical and structural properties of Sc2O3 films were found to be sensitive to substrate temperature. (C) 2009 Elsevier B.V. All rights reserved.