The relationship between the plasma conditions and the atmospheric pressure glow plasma deposition characteristics of the polyhexafluoropropene film, such as the film configuration, the deposition rate and products in plasma, was investigated. The higher deposition rate and the higher monomer use efficiency were obtained at a lower hexafluoropropene (monomer) concentration and a lower total gas flow rate (longer residence time in the plasma region). However, an extreme long residence time generated some granular deposits. And five gas phase products were detected by gas phase analysis. We considered that C(2)F(4) and C(4)H(8), which have double bond, were related to the deposition deeply. (C) 2009 Elsevier B.V. All rights reserved.