A new chemical solution deposition method for the epitaxial growth of La0.66Sr0.33MnO3 (LSMO) thin films from metal acetates, acetylacetonates and propionic acid is presented. Using this method, epitaxial LSMO thin films were grown on (001) SrTiO3 (STO) single crystalline substrates in the temperature range from 800 degrees C to 1100 degrees C, both in air and in oxygen atmosphere. The LSMO thin films exhibit good structural and electrical properties. The FWHM of the omega-scan for the (002) peak has a mean value of 0.06 degrees. The Curie temperature of the LSMO thin films is about 320 K and 350 K for the annealed in oxygen and air, respectively. (C) 2009 Elsevier B.V. All rights reserved.