Thin Solid Films, Vol.518, No.18, 5071-5077, 2010
Reactive chemical vapor deposition of Ti3SiC2 with and without pressure pulses: Effect on the ternary carbide texture
Ti3SiC2 layers were grown by reactive chemical vapor deposition (RCVD) of a H-2/TiCl4 gaseous mixture on previously deposited SiC layers. A comparison was made between classical RCVD in which the gases continuously flow at a constant low pressure during several minutes in the reactor and pressure-pulsed RCVD (P-RCVD) in which the reactor is (periodically) (re)filled with the H-2/TiCl4 gas and (re)emptied every few seconds. Long duration single treatments resulted in similar thick multi-phased coatings growing by solid state diffusion with both RCVD and P-RCVD methods. Conversely, in relation with the steps of nucleation and growth by surface reaction, the repetition of short duration SiC deposition/RCVD sequences with or without pressure pulses gave rise to Ti3SiC2 coatings with different textures. (c) 2010 Elsevier B.V. All rights reserved.
Keywords:Reactive CVD;Pressure-pulsed CVD;Ti3SiC2;Multilayer coating;Solid-gas reaction;Solid state diffusion;Nucleation step;Texture