화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.18, 5104-5109, 2010
Carbide and nanocomposite thin films in the Ti-Pt-C system
Thin films in the Ti-Pt-C system were deposited by non-reactive, DC-magnetron sputtering. Samples were characterised using X-ray photoelectron spectroscopy, X-ray diffraction, and transmission electron microscopy. A previously not reported metastable solid solution carbide, (Ti(1-x)Pt(x))C(y) with a Pt/Ti ratio of up to 0.43 was observed. This solid solution phase was present both as single phase in polycrystalline samples, and together with amorphous carbon (a-C) in nanocomposite samples. Annealing of nanocomposite samples leads to the decomposition of the solid solution phase and the formation of a nc-TiC(x)/a-C/nc-Pt nanocomposite. Test sensors for automotive gas exhausts manufactured from such a three-phase material suffer from complete oxidation of the coating at 400 degrees C with no observed sensor activity. (c) 2010 Elsevier B.V. All rights reserved.