화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.23, 6752-6755, 2010
Preparation of zinc tin oxide films by reactive magnetron sputtering of Zn on liquid Sn
Zn is sputter-deposited on melted Sn films by radio-frequency magnetron sputtering in oxidizing plasma The samples presented and absorption cut-off wavelength close to the one of ZnO, and an optical transparency higher than 50% in the visible range Ex-situ thermal annealing improves visible transparency and produces a slight blue-shift in the optical bandgap X-ray diffraction patterns show typical spectra due to polycrystalline ZnO with evidence of the presence of crystalline SnO, before annealing, and Zn(2)SnO(4,) after annealing. Rutherford Backscattering studies reveal the existence of a ZnO layer on top of an O-rich (Zn, Sn)O thin film After optimal thermal treatment, electrical characterization exhibits carrier concentrations of 10(16)-10(17) cm (3) and mobilities of 20-80 cm(2) V(-1) s(-1) for the resulting (Zn, Sn)O n-type films. (c) 2010 Elsevier B.V. All rights reserved