화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.23, 6777-6780, 2010
Properties of (K,Na)NbO3-based lead-free piezoelectric films prepared by pulsed laser deposition
To investigate the properties of (K,Na)NbO3-based lead-free piezoelectric films at the morphotropic phase boundary composition, we fabricated epitaxial [(K05Na05)(0) Li-97(0) (03)] (Nb08Ta02)O-3 films on (001), (110) and (111)-oriented single crystal SrTiO3 substrates by pulsed laser deposition. The structure and electrical properties of the films were studied. Dielectric constants of 540, 390 and 300 and remnant polarizations of 4.00, 1.05, and 0.35 mu C/cm(2) were observed for the (001), (110) and (111) oriented films, respectively (C) 2010 Elsevier B.V. All rights reserved.