Mn doped ZnO (ZnO:Mn) thin films with similar to 10 at.% of Mn were grown on quartz substrates by cathodic vacuum arc (FCVA) technique at low substrate temperature (<= 200 degrees C). The influence of temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were all films. A maximum saturation moment of 2.9 x 10(-24) Am(2)/Mn can be achieved for the films grown optimum condition. This suggests that the fabrication of high-quality ZnO:Mn films by FCVA technique the potential to realize efficient magneto-optic devices operating at ultraviolet regime. (C) 2010 Elsevier By. All rights reserved