The CrAlSiN/W2N multilayer coatings were fabricated by DC magnetron sputtering. The bilayer periods of multilayer films were controlled in the range from 3 to 20 nm. The cross-sectional structure of multilayer and monolayer coatings was evaluated by transmission electron microscopy (TEM). The wear behavior of monolayer and multilayer coatings was investigated by a pin-on-disc tribometer. The nano-scratch tester was employed to study the crack propagation of scratched coatings. The images of wear scars were observed by optical microscopy (OM). The cross-sectional image of scratched films was analyzed by transmission electron microscopy (TEM). Owing to the nano-layered structure and higher hardness (or H/E ratio), the multilayer coatings exhibited better wear resistance than homogeneous films. The coefficient of friction of CrAlSiN/W2N multilayer coating with a bilayer period of 8 nm was around 0.6, and that of CrAlSiN homogeneous film was about 0.8. Different crack propagation mechanisms of CrAlSiN/W2N multilayer and CrAlSiN monolayer coatings were proposed and discussed. (C) 2010 Elsevier B.V. All rights reserved.