Pulsed laser deposition was used in combination with real time reflection high energy electron diffraction to prepare layer-by-layer grown La1-xSrxCoO3 films on single terminated substrates. The films exhibit an epitaxially and completely strained film growth resulting in an atomic flat surface with terrace structure. The films were compared to similar layers grown by off-axis laser deposition under higher oxygen partial pressure. With decreasing oxygen pressure an increased unit cell volume and decreasing magnetic moment was observed. Furthermore, we exemplarily show the preparation of layer-by-layer grown LaCoO3 vertical bar SrTiO3 multilayers. (C) 2010 Elsevier B.V. All rights reserved.