We report in situ successive depositions of nickel nanoparticles and carbon nanotubes (CNTs) on ordered mesoporous silica films used as template for the catalyst particles. The mesoporous films are synthesized by the evaporation-induced self-assembly process from tetraethyl orthosilicate derived oligomers and a di-block copolymer from dip-coating deposition method. The substrates are decorated with Ni nanoparticles through Ion Beam Deposition and posterior annealing to induce metal coalescence in the mesoporous cavities. CNTs were then grown by Chemical Vapor Deposition in the presence of an electric field. These techniques provide a simple control method producing ordered arrangements of catalyst nanoparticles and ordered nanostructures for large area applications. (C) 2010 Elsevier B.V. All rights reserved.