ZnO is growing in importance as a functional film in flexible devices because of the wide range of electrical properties that can be achieved through appropriate doping and the relative abundance of Zn. We have deposited ZnO films with various thicknesses by sputtering on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) flexible substrates and measured their mechanical properties using compression and scratch tests coupled with in-situ optical microscopy. The cracking of ZnO, during compression, is thickness dependent and at lower thicknesses the films sputtered on PEN exhibit the highest crack onset strains, around 2%. During scratch testing, two major scratch failure mechanisms are observed, analyzed and discussed. It is also found that scratch resistance of ZnO is thickness dependent for both PET and PEN. At high scratch loads a secondary failure mechanism due to impregnation of film debris into the polymer substrates is observed. (C) 2010 Elsevier B.V. All rights reserved.