Indium-doped zinc oxide thin films deposition was performed by the sol-gel technique using homogeneous and stable solutions of zinc acetate 2-hydrate and indium chloride in ethanol Films were spin coated onto glass substrates After drying and after a heat treatment at 450 degrees C highly transparent (80%-90%) films were obtained The effect on the structural morphological optical and electrical thin films properties of the dopant concentration was investigated The temperature dependencies of the electrical conductivity under vacuum and in open atmosphere were analysed and discussed (C) 2010 Elsevier B V All rights reserved